MEMS PRODUCTS
MEMS PRODUCTS
- PVD and DLC coatings play important roles in MEMS assembly and encapsulation by improving their performances and furthering their development. Since parts and assemblies inside MEMS are easy to be damaged or corroded by external environmental factors (temperature, humidity and air, etc.), and therefore the encapsulation should be effectively protective.
- Firstly, using certain materials and processes, Arison can deposit one or more layers of films on the surface of MEMS by Arisimit® PVD and PECVD (DLC) coating techniques, reducing air-resistance, improving sensitivity and durability.
- Secondly, Arisimit® PVD and PECVD (DLC) coatings are used in many MEMS assemblies like sensors and actuators application. E.g. when making pressure sensors, they can provide pressure-sensitive film which will deform while being subjected to pressure, thereby changing electrical properties and achieving pressure measurement.
- Thirdly, Arisimit® PVD and PECVD (DLC) coatings can also be electrical conductive and/or insulative, and highly resistant to wear, corrosion, which enables them to be used for a wide range of applications for MEMS.
